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Apparatus, systems and methods for reducing surface roughness on surface of a glass member using a non-contact polishing process are disclosed. According to

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A method for forming features in a polysilicon layer is provided. A hardmask layer is formed over the polysilicon layer. A photoresist mask is formed

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Angular rate sensors cause a stream of fluid to flow by heating the fluid. A trajectory of the stream of fluid is deflected by Coriolis forces

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Radiation detectors, and methods of manufacture of radiation

Radiation detectors are disclosed. The radiation detectors comprise a substrate and at least one radiation ive region on the substrate, the at

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200513-The invention relates to a novel portable handheld instrument that can readily detect SOF2, SF4 and SO2 in SF6 gas filled electrical equipme

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A method for etching a trench to a trench depth in a dielectric layer over a substrate is provided. An ARC is applied over the dielectric layer. A

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A method of etching features into a silicon layer with a steady-state gas flow is provided. An etch gas comprising an oxygen containing gas and a

Rotation sensing apparatus and methods

2011120-Angular rate sensors cause a stream of fluid to flow by heating the fluid. A trajectory of the stream of fluid is deflected by Coriolis forc